State-of-the-art developments and applications such as electromobility and the “Internet of Things” – which address not only technical but also ecological aspects – are inconceivable without sensors.

We succeeded in developing a worldwide unique, printable and ultra-thin magnetic field sensor without an angle dependency, whereby a multitude of new areas of application can be opened up.

The core of the innovative technology is the nm-precise deposition of metallic multilayers in combination with printing technologies. This makes  possible creating a new types of sensors.

Technology

The Helmholtz Innovation Lab “FlexiSens” focuses on the development and application of a flexible and printable magnetic field sensors (Hall effect and magneto-resistive effects). We have developed novel high-performance magnetic field sensors on ultra-thin flexible substrates that have a high mechanical adaptability. Due to their extremely thin and unconventional mechanical properties, flexible and printed sensors can be used not only on various flat, but also curved objects. Our technology enables new fields of application of magnetic field sensors and the realization of printed magnetic field sensors.

Flexible magnetic field sensors

Printable magnetic field sensors

Fluidic analytic platform

  • Flexible sensors are on polymeric substrates with a thickness from 1 µm to 100 µm
  • Sensors can be processed on a sample area up to 12” wafer size
  • Fully customized sensor layout
  • Sensors mechanically bendable below 1 mm bending radii
  • Stable electrical properties upon mechanical deformations
  • Different rigid and flexible substrates (paper, ceramic, silicon, textile, polymers)
  • Substrate thickness from 6 µm
  • Tunable sensitivity to magnetic field in the range from 0.5 mT to 200 mT
  • Temperature sensor stability up to 90 °C
  • Sensors mechanically bendable below 1 mm bending radii
  • Fully customized sensor layout
  • Non-invasive droplet detection in small tubes (diameter of 500 μm and smaller)
  • Monitoring droplets, rapid screening of various substances
  • Optical, magnetic and impedance detection of different analytes
  • Not invasive flow monitoring and flow adjustment via feedback system
  • Stand-alone detection system

Technology Offer

  • Flexible and printable sensors
  • Magnetosensitive powder
  • Magnetosensitive paste
  • Large area optical lithography and depositions
  • Structural and magnetic characterization
  • Cooperation and scientific projects
Please sent your request to Dr. D. Makarov: d.makarov@hzdr.de

Team

Project Leader D. Makarov
© HZDR / A. Wirsig
Process engineer T. Voitsekhivska
© HZDR / A. Wirsig
Laboratory Head I. Moench
© I. Moench
Communication expert M. Grobosch
Business Developer S. Krüger
© HZDR
Researcher J. Schütt
© J. Schütt
Process engineer R. Illing
© R. Illing
Technician C. Schubert
© T. Voitsekhivska

Devices

Magnetron sputtering device

Wire bonder

Mili- and microfluidic setup

Confocal Microskope

Scanning electron microscope

Direct Laser Writer