Devices
- 3 magnetron sputtering systems
- deposition at up to 950 °C
- sample size up to 300 mm wafer
- magnetic and oxidic thin layers with a thickness of 1 nm up to 1 μm
- monolayer and multilayer systems with sub-nm accuracy
- up to 2 μm resolution
- 405 nm laser
- samples up to 25 cm x 25 cm
- Wedge Wedge with 17 μm Al wire
- Ball Wedge with 25 μm gold wire
- adjustable transducer frequency with up to 140 kHz
- rigid and flexible sample substrates
- non-invasive droplet detection in small tubes (diameter of 500 μm and smaller)
- monitoring droplets, rapid screening of various substances
- optical, magnetic and impedance detection of different analyses
- resolution < 14 nm
- samples up to 10 cm x 10 cm
- vertical measurement uncertainty 1 – 10 nm
- 3D surface orphology