Technology / Products

The Helmholtz Innovation Lab FlexiSens focuses on the development and application of a flexible and printable magnetic field sensors (Hall effect and magneto-resistive effects). We have developed novel high-performance magnetic field sensors on ultra-thin flexible substrates that have a high mechanical adaptability. Due to their extremely thin and unconventional mechanical properties, flexible and printed sensors can be used not only on various flat, but also curved objects. Our technology enables new fields of application of magnetic field sensors and the realization of printed magnetic field sensors.

Flexible magnetic field sensors

  • Flexible sensors are on polymeric substrates with a thickness from 1 µm to 100 µm
  • Sensors can be processed on a sample area up to 12” wafer size
  • Fully customized sensor layout
  • Sensors mechanically bendable below 1 mm bending radii
  • Stable electrical properties upon mechanical deformations

Printable magnetic field sensors

  • Different rigid and flexible substrates (paper, ceramic, silicon, textile, polymers)
  • Substrate thickness from 6 µm
  • Tunable sensitivity to magnetic field in the range from 0.5 mT to 200 mT
  • Temperature sensor stability up to 90 °C
  • Sensors mechanically bendable below 1 mm bending radii
  • Fully customized sensor layout

Fluidic magnetoelectric platform

  • Detection and characterization of liquids (mixtures) in tubings
  • Sterile and non-contact measurements in continuous or segmented flow
  • Contactless measurement of liquids without the addition of secondary materials, regardless of critical liquid properties (pH values, oxidative properties)

Functional fluidic connectors

  • Transparent, functional connectors for micro- and millifluidic applications
  • Great design options for the channel arrangements and dimensions (up to 500 µm), length and shape of the channels, as well as the introduction of threads and gaps
  • Choice of different material properties (transparency, biocompatibility, mechanical / thermal load capacity, …)

Technology Offer

  • Flexible and printable sensors
  • Magnetosensitive powder
  • Magnetosensitive paste
  • Large area optical lithography and depositions
  • Structural and magnetic characterization
  • Cooperation and scientific projects

Please send your request to: info@flexisens.de

Devices

Magnetron sputtering device

  • 3 magnetron sputtering systems
  • Deposition at up to 950 degC
  • Sample size up to 300 mm wafer
  • Magnetic and oxidic thin layers with a thickness of 1 nm up to 1 µm
  • Monolayer and multilayer systems  with  sub-nm accuracy

Wire bonder

  • Wedge wedge with 17 µm Al wire
  • Ball wedge with 25 µm gold wire
  • Adjustable transducer frequency with          up to 140 kHz
  • Rigid and flexible sample substrates
  • Manual and semi-automatic bonding    process with deformation control 

Milli- and microfluidic setup

  • Non-invasive droplet detection in small tubes (diameter of 500 μm and smaller)
  • Monitoring droplets, rapid screening of various substances
  • Optical, magnetic and impedance detection of different analytes

Confocal Microskope

  • Vertical measurement uncertainty: 1-10 nm
  • 3D surface orphology

Scanning electron microscope

  • Resolution <14 nm
  • Samples up to 10 cm x 10 cm

Direct Laser Writer

  • Up to 2 µm resolution
  • 405 nm laser
  • Samples up to 25cm x 25cm